Glass materials have excellent physical and chemical properties and are used in a wide range of industries, including semiconductors that require high heat resistance, high purity, high insulation, and high breakdown voltage. The ultra-thin glass with a thickness of several micrometers to several tens of micrometers shows a high advantage in various applications, and its market is expected to increase in the future. However, when conventional glass processing technology is applied to the ultra-thin glass, there is a high risk of breakage and cracking during pre-treatment, fixing and cleaning. Therefore, we have developed a processing method of ultra-thin glass without thermal shock using an ultra-short pulse laser technology.
Development of all glass cell culture device using micro glass filter
As glass is physically and chemically stable, cells analysis cultured in an all-glass microfluidic device is expected in the life science research field. Until now, it has been difficult to supply enough gas and nutrients to the cultured cells in an all-glass microfluidic device. In this study, we developed an all-glass cell culture device using an ultra-thin glass filter that pores have been formed with a femtosecond laser.
Development of all-glass thin-film pressure sensor using ultra-thin glass
Small thin-film pressure sensors that use the small deformation of thin films has an important role in scientific and engineering research fields. However, conventional sensors had problems with heat resistance, acid / alkali resistance, and transparency. In this research, we combined the principle of the conventional thin film type pressure sensor with the ultra-thin glass processing technology, and developed a gas-liquid dual-use thin film pressure sensor that can be used in high temperature of 800 degrees, acid, and alkali environment.