奈良先端科学技術大学院大学 物質創成科学研究科
グリーンデバイス研究室〔中村研究室〕
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(by Excite)

Experimental equipments

High-vacuum sublimation purification / crystal growth furnace
(Original)

UV/O3 treatment & DC sputtering

UHV RF magnetron sputtering

Vacuum evaporation for metals

High-velocity molecular-beam deposition chamber
(Original)

High-velocity molecular-beam cell
(Original)

Organic/inorganic multi-source evaporation
(Original) with
Circulation purification type glove box

Circulation purification type glove box
with Organic/inorganic multi-source evaporation

DC magnetron sputterin

High-temp furnace

Grove boxes

Clean bench for substrate preparation

Hot press

Spinning machine for CNT composite thread

Pulling device for CNT composite thread

Draft chamber 1&2

Draft chamber 3
& Spin coater

  • Others:
    • Centrifugal separator
    • Ultra-pure water
    • etc.

Stylus profilometer

Ellipsometer

Grove-box prober

Semiconductor parameter analyzer

Scanning probe microscope (general use)

Atomic-Force-Microscope Potentiometry (AFMP)
(Original)

High-vacuum scanning probe microscope (general use)

UV-Vis-NIR spectrophotometer

Spectrophotofluorometer

Thermoelectric measurement system 1
- ultra-high resistance
- UHV in-situ
- Two K-cells
(Original)

Thermoelectric measurement system 2 (PPMS)
- heat capacity
- thermal transport
- ZT

Thermoelectric measurement system 3
- module
- powder sample
(Original)

Thermoelectric measurement system 4
- ambient pressure to low vacuum
(Original)

Thermal conductivity measurement system 1
(TWA method)
- room temperature
- high k
- thermal diffusivity

Thermal conductivity measurement system 2
(TWA method)
- variable temperature
>- thermal diffusivity

Thermal conductivity measurement system 3
(3ω method)
- wire sample
- thermal conductivity

GPU cluster for computational Chemistry

fs lazer + Telahertz time-domain spectrosopy (THz-TDS)
(Original)

Drift-free variable-temperature stage for SR-GIXD
(co-developped with Prof. Yoshimoto, Iwate Univ)

Solar simulator/p>

External quantum efficiency measruement system

LCR meter
for impedance spectroscopy

  • Others:
    • C-V measuremnt
    • optical microscope
    • device simulator for organic devices
    • etc.

よく使う共用装置など

X線回折装置@SPring-8

  • リソグラフィー用露光装置
  • インクジェット成膜装置
  • X線回折(XRD)装置
  • 顕微ラマン分光装置
  • X線光電子分光(XPS)装置
  • 二次イオン質量分析(SIMS)装置
  • 分光感度・内部量子効率測定装置(CEP-2000RP)
  • 大気中光電子分光装置(AC-3)
この他にも、充実した研究科共通設備を随時使用します。