Metrology Informatics Laboratory
Staff & Contact
| Educational Staff | Prof. Shigetaka Tomiya Associate Prof. Zentaro Akase Assistant Prof. Kazunori Iwamitsu |
|---|---|
| URL | https://sites.google.com/view/naist-metrology-info-en |
Education and Research Activities in the Laboratory
In our laboratory, students will learn skills and knowledge of radiation detection and dosimetry. We aim to enable students to independently conduct researches and publish papers in this research fields.
Research Themes
1. Multimodal Metrology
Advanced functional devices are indispensable for social infrastructure systems that must be more sophisticated and energy-efficient. In line with this trend, device structures and fabrication processes are becoming more complex, and introducing new materials is essential to add new functions. Such R&D requires the development and introduction of further analysis and measurement techniques. Furthermore, it is necessary to combine multiple analysis and measurement methods to understand the issues and phenomena truly. We are also working on the development of methods for this purpose. Specifically, we are investigating multi-scale and multi-modal optical spectral imaging methods that combine microscopic photoluminescence and scanning electron microscopy-cathodoluminescence at different spatial scales for advanced compound and two-dimensional semiconductors. We are also working on ways that integrate scanning transmission electron microscopy images with three-dimensional atom probe methods.
2. Metrology informatics infrastructure
To efficiently advance research and development of materials and devices, the experimental cycle of measurement design synthesis/process must be effectively executed. For this purpose, a database that automatically accumulates experimental data is indispensable. Furthermore, the development of automated analysis techniques for measurement data is also required. For this purpose, we will work on technologies for automatic spectral data analysis, etc.
Explanatory Pictures of Research Activities
Recent Research Papers and Achievements
- Y. Yamaguchi, Y. Kanitani, Y. Kudo, J. Uzuhashi, T. Ohkubo, K. Hono, and S. Tomiya, “Atomic diffusion of Indium through threading dislocation in InGaN quantum wells” Nano Lett. 22, 6930-6935 (2022)
- H. Yamamoto, K. Tanaka, S. Tomiya, S. Yamashita, M. Ukita, H. Nakano, R. Shirasawa, M. Kotera, K. Funatsu, “Dry Etching Damage and Alloy Composition Analysis of GaN-Based Semiconductors Using Electron Energy-Loss Spectroscopy” J. Elect. Matter 50, 4230 (2021)