奈良先端科学技術大学院大学 物質創成科学領域

Metrology Informatics Laboratory

Education and Research Activities in the Laboratory

While considering students’ backgrounds and motivations, we set themes related to metrology technology and materials analysis, which are indispensable for the research and development of advanced functional materials and devices. We aim to cultivate problem-solving skills by pursuing the essentials using information science and computer simulations. In addition, through joint research with other organizations and participation in academic conferences at domestic and abroad, we cultivate the ability to think from a broad perspective. 　In our laboratory, we develop material analysis and measurement techniques necessary for realizing next-generation advanced materials and devices while entirely using information science. We also aim to solve various problems in the research and development of advanced materials and devices using the developed methods. Research themes will be actively pursued as joint research inside and outside the university.

Research Themes

1.Multimodal Metrology

Advanced functional devices are indispensable for social infrastructure systems that must be more sophisticated and energy-efficient. In line with this trend, device structures and fabrication processes are becoming more complex, and introducing new materials is essential to add new functions. Such R&D requires the development and introduction of further analysis and measurement techniques. Furthermore, it is necessary to combine multiple analysis and measurement methods to understand the issues and phenomena truly. We are also working on the development of methods for this purpose.

Specifically, we are investigating multi-scale and multi-modal optical spectral imaging methods that combine microscopic photoluminescence and scanning electron microscopy-cathodoluminescence at different spatial scales for advanced compound and two-dimensional semiconductors. We are also working on ways that integrate scanning transmission electron microscopy images with three-dimensional atom probe methods.

2.Metrology informatics infrastructure

To efficiently advance research and development of materials and devices, the experimental cycle of measurement, design, synthesis/process must be effectively executed. For this purpose, a database that automatically accumulates experimental data is indispensable. Furthermore, the development of automated analysis techniques for measurement data is also required. For this purpose, we will work on technologies for automatic spectral data analysis, etc.

Explanatory Pictures of Research Activities

Recent Research Papers and Achievements

1. Y. Yamaguchi, Y. Kanitani, Y. Kudo, J. Uzuhashi, T. Ohkubo, K. Hono, and S. Tomiya, “Atomic diffusion of Indium through threading dislocation in InGaN quantum wells” Nano Lett. 22, 6930-6935 (2022)
2. H. Yamamoto, K. Tanaka, S. Tomiya, S. Yamashita, M. Ukita, H. Nakano, R. Shirasawa, M. Kotera, K. Funatsu, “Dry Etching Damage and Alloy Composition Analysis of GaN-Based Semiconductors Using Electron Energy-Loss Spectroscopy” J. Elect. Matter 50, 4230 (2021)