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Our Goal

The goal of our laboratory is the creation of advanced photonic devices that can fulfill challenging roles in this information-intensive and increasingly aged society. To achieve this, we are vigorously engaged in research and development into the field of photonic materials, and are continuously examining new functionalities in our search for photonic elements that can achieve faster and more flexible handling of optical images.

Main Reseach Topics

Photonic LSI devices, which are created based on cutting-edge semiconductor, integrated circuit, and photonic technologies, offer promising ways to realize highly functional systems for use in medical care, chemical analysis, and opto-electronic systems. In order to develop novel and innovative photonic LSIs, we continuously investigate, both theoretically and experimentally, all issues related to optical materials, device structures and photonic technologies.

Fig.1: Research covered in our laboratory

The followings are our current research topics:

  1. R&D in photonics materials and devices for biomedical uses
    ・Photonic-bio chips based on Si-LSI technology.
    R&D into retinal prosthesis, with the goal of restoring the sense of vision (Fig.2); R&D into human memory mechanisms as they can be applied to brain-implanted devices that can counter functional brain disorders (Fig.3).

    Fig. 2: Retinal prosthesis

    Fig. 3: Brain-implanted device

  2. R&D into microchemical photonic devices
    Devices combining microchemistry and photonic LSI technology.
    Micro fluidic circuits equipped with various devices based on CMOS technology and Chemo-LSI (such as shown in Fig. 4) will provide a foundation for new artificial synapse and flash chemistry applications.

    Fig. 4: Chemo-LSI system

  3. R&D into highly sensitive imaging sensors and systems that employ them
    Sophisticated CMOS image sensors and sensor-based systems that based on deca-nanometer SoC technology.
    We will continue our R&D into vision chips that are capable of detecting a wide range of physical quantities, such as electromagnetic fields and optical polarization.

Research Equipment and Facilities

  1. Equipment used for creating photonics devices:
    DRIE; RIE; isotropic dry etcher; resistance-heated deposition apparatus; parylene coater; annealing furnace; asher; ball-wedge wire bonder; flip-chip bonder; die bonder; excimer laser; laser repair equipment
  2. Shared facilities and equipment for nano materials science:
    Test equipment including XPS/AES, SEM, TEM, SIMS and AFM; and process equipment for nano-fabrication including FIB; clean rooms; sputtering equipment; vapor deposition equipment; mask aligners (sealed and reduced projection).
  3. Equipment for design and testing of photonic LSI:
    Sun Blade 1000 Ultra 60 workstations (2), other workstations; chip design ECAD; device simulators (Medici, Spectra); semiconductor analyzers; high-speed oscilloscopes (3 GHz); data generators; logic analyzers; network analyzers; manual prober; electrophysiological experimental apparatus.

Joint Research, Social Activities

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Photonic Device Science Laboratory Graduate School of Materials Science NAIST